Page 1 HP 4062UX Semiconductor Process Control System HP 4062F Semiconductor Parametric Test System Installation Manual ABCDE HP Part No. 04062-90240 Printed in Japan October 1994 Edition 1 E1094...
Page 2 HP will, at its option, either repair or replace products which prove to be defective. Warranty service of this product will be performed at Buyer's facility at no charge within HP service travel areas. Outside HP service travel areas, warranty service will be performed at Buyer's facility only upon HP's prior agreement and Buyer shall pay HP's round trip travel expenses.
Page 3 Printing History New editions are complete revisions of the manual. Update packages, which are issued between editions, contain additional and replacement pages to be merged into the manual by the customer. The dates on the title page change only when a new edition is published. No information is incorporated into a reprinting unless it appears as a prior update;...
Page 4 In addition, it violates safety standards of design, manufacture, and intended use of the instrument. Hewlett-Packard Company assumes no liability for customer's failure to comply with these requirements. HP 4062UX/F complies with INSTALLATION CATEGORY II and Note POLLUTION DEGREE 2 dened in IEC 1010-1.
Page 5 Safety Symbols The general denitions of safety symbols used on equipment or in manuals are listed below. Instruction manual symbol: the product will be marked with this symbol when it is necessary for the user to refer to the instruction manual in order to protect against damage to the instrument.
Page 6 Preface Purpose This manual contains the installation information for both HP 4062UX and HP 4062F system. Refer to the for the information about the site-preparation of the Pre-installation Manual customers. Audience This manual is intended for the HP Customer Engineers who perform the installation of the HP 4062UX/F system.
Page 7: Table Of Contents
Random Access Memory (RAM) ....HP-IB Interface Cards ......
Page 8 Installing the HP 4142B ..... . 4-10 HP 4142B DCS Settings ..... . . 4-11 Installation of HP 4280A Capacitance Measurement Subsystem (CMU) .
Page 9 Installing and Customizing HP IMA ....5-14 Installing HP IMA/UX ..... . 5-14 Customizing for HP IMA/UX .
Page 10 Introduction ......Updating for HP 4062UX/F ..... .
Page 11 4-2. Installing the HP 4142B ..... . . 4-10 4-3. HP 4142B Settings ......4-11 4-4.
Page 12 6-3. Example of Conguration Page ....6-4. PV4062 Menu Page (HP 4062UX) ....
Page 13 B-2. Printer Conguration Softkey Map ....Contents-7...
Page 14 Tables 2-1. HP-IB Interface Settings ..... . . 2-2. HP-IB Interface Card Switch Settings ....
Page 15: General Information
Parametric Test System. This chapter covers the installation sequence, required reference material, and equipment required to install the HP 4062UX/F. Chapter 2 covers system controller installation. Chapter 3 covers switching matrix installation. Chapter 4 explains how to integrate the system controller, switching matrix, and cabinet-mounted instruments into a system.
Page 16: Installation Sequence
Installation Sequence This section can help you arrange the installation process of the HP 4062UX/F to get the eective use of your time. For example, Figure 1-2 shows examples of ecient installation sequences. To install the HP 4062UX/F system on a new hard disk, you must install the HP-UX system les, which need about 200 megabytes.
Page 17: Required Equipment
Slip-joint Pliers Battery-powered Voltmeter Utility Software The system software contains the following utilities for checking the installation process: PROBER program Checks your prober operations after installing the HP 4062UX/F system. For details, see the following les: /usr/pcs/etc/prober_check/READ_ME check62ux A shell procedure that checks the system software installation of the HP 4062UX/F.
Page 19: System Controller Installation
This chapter provides system controller and accessories installation information for the HP 4062UX/F system. The HP 4062UX/F system includes a system controller as follows: HP 9000 Series 300 Model 360, 370, 375, 380, 382, or R/382; Model 340, or 345 for diskless cluster conguration.
Page 20: Unpacking
Unpacking Remove the computer from its carton and check the computer accessories against the packing list of the carton. Accessory items (add-on RAM cards, interface cards, etc.) are shipped separately. Do not remove these accessories from their antistatic envelopes until you are ready to install them into the computer.
Page 21: Hp 9000 Series 300 Hardware Installation
Note Module" because you cannot add accessories to these computer models. If the system controller is an HP 9000 Series 300 Model 340, 360, 370, 375, 380, 382, or R/382, the computer needs additional accessories, and may include several optional accessories, depending on the system software conguration and memory requirements.
Page 22: Hp-Ib Interface Cards
HP-IB Interface Cards The HP 4062UX/F requires an HP 98624A Interface Card in addition to the Series 300 built-in HP-IB interface. Each HP-IB interface is reserved for a specic system function, as listed in Table 2-1. Table 2-1. HP-IB Interface Settings...
Page 23: Id Module
HP 4062UX/F, that uses the HP \Codeword Delivery" security scheme. The ID Module must be installed in the HP-HIL interface system as shown in Figure 2-2. Refer to \HP 46084A HP-HIL ID Module" in Chapter 6 of the Installing Peripherals, Volume for complete ID Module installation information.
Page 24: Verifying Installed Accessories
If this message is displayed, repeat the interface card installation procedure and repeat step 1. If the message still does not appear, contact your HP Service Representative for assistance. b. The last message in the list means the amount of physical memory size. If the expected memory size is displayed (depending on how much memory you installed), for example , you have correctly installed the additional memory card(s).
Page 25: Hp 9000 Series 700 Hardware Installation
HP 9000 Series 700 Hardware Installation The following paragraphs brie y describe the accessories and installation. For any accessories that are not described in the following paragraphs, see the of the Installation Guide accessories. Before you install or remove any computer accessory, turn the computer Caution OFF and unplug its power cord.
Page 26: Hp-Ib Interface Cards
HP-IB Interface Cards This section explains how to install HP-IB interface cards. You need to install HP-IB interface cards in the following cases: When you use Series 700 Model 725 computer. When you use Series 700 Model 745i or 747i computer with a prober, a printer, or a plotter, which are controlled via HP-IB from HP 4062UX/F.
Page 27: Id Module
HP 4062UX/F, that uses the HP \Codeword Delivery" security scheme. The ID Module must be installed in the HP-HIL interface system as shown in Figure 2-4. Refer to \HP 46084A HP-HIL ID Module" in Chapter 6 of the Installing Peripherals, Volume for complete ID Module installation information.
Page 28: Rack Mounting Instructions
(depending on the controller model and conguration) for rack mounting the controller. The following paragraphs provide controller rack mounting information. If the HP 4062UX/F is still in its shipping container, refer to chapter 4, \Receiving," in the HP 4062UX/F and unpack the cartons before continuing with this Pre-installation Manual chapter.
Page 29: Controller And Backplane Expander Installation Procedure (Option 701 Or 702)
Controller and Backplane Expander Installation Procedure (Option 701 or 702): 1. Remove the support shelf and front panel (left- and right-hand plates) from the system cabinet. 2. Lay the support shelf (1) on a at surface. 3. Thread the strap (2) as follows: a.
Page 30: Rack Mounting The Controller And Backplane Expander
Figure 2-5. Rack Mounting the Controller and Backplane Expander 2-12 System Controller Installation...
Page 31: Installing Controller (Option 705 Or 706)
Installing Controller (Option 705 or 706) Option 705 or 706 rack mount kit contains two rack anges and eight screws. Use the rack mount kit to install the controller into the lower empty space of the system cabinet as described in the following procedure. 1.
Page 32: Mass Storage Unit
Table 2-5 lists option 720, and 740 rack mount kit contents for rack mounting the hard disk or cartridge tape drive. Check the contents of the kit against Table 2-5 before proceeding. Table 2-5. Options 720, and 740 Rack Mount Kit Contents Item Description HP Part Number Quantity (1) Support Shelf 04062-00198 (2) Strap 9223-0678...
Page 33: Rack Mounting The Mass Storage Unit
7. Place the front panel (3) over the mass storage unit and secure the front panel to the support shelf of the mass storage unit, then to the system cabinet, using the furnished at-head screws and washers. Figure 2-7. Rack Mounting the Mass Storage Unit System Controller Installation 2-15...
Page 35: Switching Matrix Installation
This section provides HP 4085B/F SWM installation information and includes information on unpacking, installing additional pin boards, and connecting test xtures. Unpacking The HP 4085B/F weighs about 22 kg (48.4 lb) and is wrapped in vinyl, making it Warning difficult to lift and carry. Be very careful when handling the SWM.
Page 36: Installing Additional Pin Boards
Installing Additional Pin Boards To install additional HP 16320B Pin Boards in your SWM, refer to Figure 3-1 and perform the following procedure: Install pin boards at the installation site only. Wear rubber gloves and a lint Caution free cloth cap and gown. Oil, perspiration, hair, brous dust, and dirt degrade board insulation and reduce measurement accuracy.
Page 37 Figure 3-2. Handling Pin Boards 6. Insert each pin board into the desired slot and connect the cable assembly of the board to the corresponding position on the measurement pin mounting ring. 7. Reconnect the pin board control cables, reinstall the board struts, and replace the bottom panel.
Page 38: Installing The Swm On A Wafer Prober
Because the SWM cannot be installed directly on the manual wafer probers or small automatic wafer probers, you need the Extension Cable Fixture (HP 16077A for HP 4085B SWM or HP 16077F for HP 4085F SWM) to connect the SWM to the manipulator or probe card of the prober.
Page 39 Do not touch the measurement pins of the SWM or the extension cable Caution xture. Oil, perspiration, and dirt prevent good electric contact and degrade measurement accuracy. Figure 3-3. HP 16077A/F Extension Cable Fixture Switching Matrix Installation 3-5...
Page 40: Connecting Test Fixtures
Connecting Test Fixtures If you specify test xtures, your HP 4062 includes the HP 16066A Test Fixture Adapter and the following two test xtures to satisfy virtually any measurement application. HP 4062UX HP 16067A 24-pin DIP Low Leakage Fixture HP 16068A 48-pin DIP Low Leakage Fixture...
Page 41 For complete information on a specic test xture, refer to the for that test Operation Manual xture. Switching Matrix Installation 3-7...
Page 42: Hp 4089B (96-Pin) Swm Installation (Hp 4062Ux Only)
xtures. Unpacking The HP 4089B weighs about 55 kg (121 lb) and is wrapped in vinyl, making it Warning difficult to lift and carry. Be very careful when handling the HP 4089B SWM.
Page 43: Installing A Port Expander
Figure 3-5. Installing a Port Expander Installing the SWM on a Wafer Prober The prober manufacturer and the customer are responsible for mounting the HP 4089B onto your wafer prober, and subsequent adjustment and service. Hewlett-Packard will, however, provide technical assistance regarding SWM installation upon request. Contact your nearest HP Service Oce for assistance.
Page 44 Automatic Wafer Probers Before you can install the SWM and HP 16377A/B Personality Board onto the wafer prober, mounting hardware|hinge, head plate, and so on|must be fabricated. For this purpose, the dimensions and other mechanical specications for the SWM and the personality board are...
Page 45 Connecting Test Fixtures If you specied test xtures, your HP 4062C or HP 4062UX includes the HP 16370A Test Fixture Adapter and the following test xtures to satisfy virtually any measurement application. HP 16371A 24-pin DIP Low Leakage Fixture HP 16372A 48-pin DIP Low Leakage Fixture...
Page 47: System Installation
Installing the System Cabinet If the HP 4062 is still in its shipping container, unpack the system and move it to its nal location. Refer to the HP 4062 to unpack and move the system.
Page 48: Stabilizing The System Cabinet
Installing Power Cables If the line voltage in your area is 100 Vac, the HP 4062 includes a 3-meter power cable. The cable has a 30 A rating with a NEMA L5-30P plug. For Japan, however, the cable has a NEMA L6-30P plug.
Page 49: When An Emergency O Unit Is Furnished
100 Vac, 120 Vac, 220 Vac, and 240 Vac. The maximum current for each PDU is shown in Table 4-2. Table 4-2. Maximum Current for PDU with Emergency Off Unit Line Voltage HP Part Number Total Maximum Maximum Current Current...
Page 50 1. Set the two circuit breaker switches to OFF. 2. Remove the rear opening cover of the PDU by removing the four screws. 4-4 System Installation...
Page 51: When An Emergency O Unit Is Not Furnished
3. Remove the clear plastic cover of the power 4. Pass the power cable through the hole of the cable terminal unit. rear opening cover. 5. Connect the power cable to the terminals of 6. Reinstall the clear plastic cover on the power the power cable terminal unit.
Page 52 Table 4-3. Maximum Current for PDU Line Voltage HP Part Number Total Maximum Maximum Current Current of Each Outlet 100 Vac or 120 Vac 04062-60201 20 A 10 A 220 Vac or 240 Vac 04062-60202 10 A Main power cable installation must be performed by trained service personnel Warning or electrician only.
Page 53: Installing Power Cables For Each Instrument
Power cables for each rack mounted instrument are installed before the HP 4062 system is shipped from the factory. Before you turn the HP 4062 on, however, make sure that all power plugs are completely inserted into the outlets of the PDU.
Page 54: Changing The Line Voltage
(HP part number 8120-1763), which has CEE 22-VI plug, can be connected to the PDU (HP part number 04062-60205 and 04062-60206) for 220 Vac or 240 Vac line voltage. Table 4-4 shows the proper rating and HP part number of the fuse for each instrument.
Page 55: Installation Of Hp 4142B Dc Subsystem (Dcs)
1. Remove the side strips from each side of the HP 4142B. 2. Attach the rack anges (1) to each side of the HP 4142B using the screws (2) furnished with Option 405. 3. Remove the 4 feet and 2 tilt stands from the bottom panel of the HP 4142B.
Page 56: Installing The Hp 4142B
1. Slide the HP 4142B into the system cabinet. 2. Secure the rack anges of the HP 4142B to the cabinet using the furnished washers (4) and (5) and screw (3). 3. Secure the rear panel of the HP 4142B to the cabinet using the furnished stoppers (6) and screws (7).
Page 57: Hp 4142B Dcs Settings
HP 4142B DCS Settings When the HP 4142B DCS is installed into the HP 4062 at the factory, the HP 4142B is set as shown in Figure 4-3. Conrm these settings. Figure 4-3. HP 4142B Settings (1) CIRCUIT COMMON (...
Page 58: Installation Of Hp 4280A Capacitance Measurement Subsystem (Cmu)
1. Remove the side strips from each side of the HP 4280A. 2. Attach the rack anges (1) to each side of the HP 4280A using the screws (2) furnished with Option 515. 3. Remove the 4 feet and 2 tilt stands from the bottom panel of the HP 4280A.
Page 59: Installing The Hp 4280A
Figure 4-4. Attaching Rack Flanges to the HP 4280A Installing the HP 4280A To install the HP 4280A into the HP 4062 system cabinet, refer to Figure 4-5 and perform the following procedure: 1. Slide the HP 4280A into the system cabinet.
Page 60: Installing The Hp 4280A
Figure 4-5. Installing the HP 4280A 4-14 System Installation...
Page 61: Hp 4280A Cmu Settings
HP 4280A CMU Settings When the HP 4280A CMU is installed into the HP 4062 at the factory, the HP 4280A is set as shown in Figure 4-6. Conrm these settings. Figure 4-6. HP 4280A Settings on the Front and Rear Panels...
Page 62: Installation Of Hp 4284A Capacitance Measurement Subsystem (Cmu84)
1. Remove the side strips from each side of the HP 4284A. 2. Attach the rack anges (1) to each side of the HP 4284A using the screws (2) furnished with Option 535. 3. Remove the 4 feet and 2 tilt stands from the bottom panel of the HP 4284A.
Page 63: Attaching Rack Flanges For Hp 4284A
Figure 4-7. Attaching Rack Flanges for HP 4284A System Installation 4-17...
Page 64: Installing The Hp 4284A
Installing the HP 4284A To install the HP 4284A into the HP 4062 system cabinet, refer to Figure 4-8 and perform the following procedure: 1. Slide the HP 4284A into the system cabinet. 2. Secure the left rack ange of the HP 4284A to the system cabinet using the furnished washers (4) and (5) and screw (3).
Page 65: Installation Of Hp 8110A Pulse Source Subsystem (Pss) (Hp 4062F Only)
For HP 4062F systems ordered with Option 555 (rack mount kit for the HP 8110A PG), the HP 8110A is not installed in the system cabinet, so you need to perform this installation. If you do not need to perform this installation, skip the next procedure.
Page 66: Installation Preparation
1. Remove the side strips from each side of the HP 8110A. 2. Attach the rack anges to each side of the HP 8110A using the screws. The anges and screws are contained in the ange kit (1).
Page 67: Installing The Hp 8110A
Figure 4-9. Attaching Rack Flanges to HP 8110A Installing the HP 8110A To install the HP 8110A into the HP 4062F system cabinet, refer to Figure 4-10 and perform the following procedure: 1. Slide the HP 8110A into the system cabinet, and t to the inside panel.
Page 68: Trigger Cable Connections Of One Hp 8110A
Figure 4-11. Trigger Cable Connections of One HP 8110A Trigger Cable Connections of Two HP 8110As (Continued) Trigger Cable Connections of Three HP 8110As (Continued) 4-22 System Installation...
Page 69 Trigger Cable Connections of Four HP 8110As (Continued) Trigger Cable Connections of Five HP 8110As (Continued) System Installation 4-23...
Page 70 Attach a BNC T-adapter (6) to the TRIGGER OUT terminal on the rear panel of the top HP 8110A (PG1). b. Attach a probe tip-to-BNC adapter (7) to the BNC T-adapter (6). c. Connect a resistive probe (8) to the probe tip-to-BNC adapter.
Page 71: Pulse Adder/Splitters Fixed On The Support Rail
If the pulse adder/splitters (11) are not xed to the support rail of the HP 8110A, x with cable ties as shown in Figure 4-13. Figure 4-13. Pulse Adder/Splitters Fixed on the Support Rail System Installation 4-25...
Page 72: Hp-Ib Cables And Addresses
SWC is SWC2. An HP 4280A and an HP 4284A cannot both be installed in the HP 4062F system at the same time. Depends on number of installed HP 8110As. If one HP 8110A is installed, it has HP-IB address 25. If two HP 8110As are installed, they have HP-IB addresses 25 and 26, and so on.
Page 73: Connections Between The Controller And The System Instruments
(system instruments) System printer or plotter If no devices are connected to the built-in HP-IB (select code 7), you can connect the system instruments to the built-in HP-IB interface instead of the HP-IB interface card (select code 27). You cannot connect the system instruments to an HP-IB interface to which the system printer/plotter or other instruments are connected.
Page 74: Connections Of The Hp-Ib Cables
Figure 4-15. Connections of the HP-IB Cables with Controller If the HP 9000 series 300 model 340 or 345 controller is used as a system controller in the diskless cluster, connect the HP-IB of the system instruments to the built-in HP-IB interface...
Page 75 (select code 7) of the controller using the furnished 4 m HP-IB cable. Note that no printer or plotter can be connected to the built-in HP-IB interface of the diskless cluster. System Installation 4-29...
Page 76: Hp-Ib Address And Connection Of The Wafer Prober
HP-IB Address and Connection of the Wafer Prober The user is responsible for determining the HP-IB address of the wafer prober, if a wafer prober is installed in the HP 4062 system. Hewlett-Packard, however, recommends setting the HP-IB address of the wafer prober to the default address included in the SYSCONFIG le (refer to the \Customizing the Wafer Prober"...
Page 77: Installing Signal Cables
SWM systems, connect another control cable to the TO SWITCHING MATRIX terminal on the rear panel of SWC2. Note that the HP-IB address of SWC or SWC1 is set to 22 and the HP-IB address of SWC2 is set to 19.
Page 78 1. Thread the interconnection cable (HP part number 04085-61684) through the right-hand cable entry opening (below the CMU or CMU84) on the front panel of the cabinet. 2. Connect the SMU Port 1 through SMU Port 4 cables to the SMUs (HP 41420As and HP 41421Bs) of DCS.
Page 79: Connecting The Cmu To The Swm
2. Connect a triaxial-triaxial adapter (HP part number 1250-1838) to the cable assembly CMH connector and one to the CML connector. 3. Thread the CMH cable (HP part number 04085-61661) and CML cable (HP part number 04085-61662) through the left-hand cable entry opening (below the CMU) on the front panel of the cabinet.
Page 80: Connecting The Cmu84 To The Swm
) left side of the UNKNOWN terminal. 4. Connect the red and orange leads from the test leads using a BNC-T adapter (HP part number 1250-0781). Connect the BNC-T adapter to the AUX3 (CMH) terminal of the SWM using a BNC f-to-f adapter (HP part number 1250-0080) and 23 cm BNC cable (HP part number 8120-1838).
Page 81 AUX33 port, you must remove the tag labeled \4" from the cable. The SMU cable must be connected to the FORCE terminal of the SMU. A triax cover (HP part number 1250-1708) must be put on the SENSE terminal of the SMU.
Page 82: When Your System Is Hp 4062F
HP 4085F SWM, HP 4084B SWC, HP 4142B DCS, HP 4280A CMU or HP 4284A CMU84, and HP 8110A PG(s). Note that all the signal cables must be connected from the SWM to the instruments through the cable entry opening of the rear panel of the system cabinet.
Page 83: Connecting The Hp 4084B Swc To The Hp 4085F Swm
2. Connect the other control cable terminal to the TO SWITCHING MATRIX CONTROLLER terminal of the HP 4085F SWM. Figure 4-22. Connecting the HP 4084B SWC to the HP 4085F SWM System Installation 4-37...
Page 84: Connecting The Hp 4142B Dcs To The Hp 4085F Swm
1. Thread the interconnection cable (HP part number 04085-61684) through the right-hand cable entry opening (below the HP 4280A or HP 4284A) on the front panel of the cabinet. 2. Connect the SMU Port 1 through SMU Port 4 cables to the SMUs (HP 41420As and HP 41421Bs) of HP 4142B.
Page 85: Connecting The Hp 4280A Cmu To The Hp 4085F Swm
Figure 4-18 shows the cable connections between the HP 4280A CMU and HP 4085F SWM. Use the following procedure to install the cables: 1. Connect the cable assembly (HP part number 04062-61601) to the UNKNOWN terminals of the HP 4280A CMU.
Page 86: Connecting The Hp 4284A Cmu84 To The Hp 4085F Swm
HP 4284A) on the front panel of the cabinet. 2. Connect the test leads to the UNKNOWN terminals on the front panel of the HP 4284A. 3. Insert the banana terminal of the test leads into the ground terminal ( ) left side of the UNKNOWN terminal.
Page 87 Although the cables from the system cabinet are about 4 m long, position the HP 4085F SWM less than 2 m from the system cabinet. Also, if the HP 4085F SWM is installed on a wafer prober, make sure there is enough slack in the cables so that the HP 4085F SWM can be easily raised and lowered.
Page 88: Connections Between Output Terminals Of The Hp 8110A And Hf Ports
4. On the cable adapter that is attached to HP 4085F SWM, connect BNC connector of each PG cable to corresponding HF port. Hewlett-Packard recommends that when you install the HP 4062F system, you connect the PG cables to the HF ports as shown in Table 4-13. Table 4-13.
Page 89: Removing System Instruments
To remove or extend a system instrument from the cabinet, remove the screws from the rack anges of that instrument. The HP 4142B, HP 4280A, HP 4284A, or HP 8110As are mounted on instrument support rails. These instruments can be extended or removed from the cabinet for servicing or for standalone use.
Page 90: Testing Each Instrument
After installing all the system instruments, inspect each instrument before applying power. Complete the following procedure and refer to the of the each instrument. Operation Manual If any failures are detected, see the HP 4062C/UX , the HP 4062F Service Manual Manual , or the of the instrument that failed.
Page 91: Testing Power Distribution Unit (Pdu) (Hp 4062Ux Only)
22. Turn on the circuit breaker for the emergency o unit. 23. Press the LINE switch. 4 1 5 Testing Power Distribution Unit (PDU) (HP 4062UX Only) If your system is furnished with an emergency o unit, skip this test. This test checks the following item: Operation of circuit breaker Use the following procedure to check the test item above: 1.
Page 92: Testing Each System Instrument
ON to warm up the system instruments. Cleaning To prevent electrical shock, never use a wet cloth when cleaning the HP 4062UX/F. Always use a slightly damp or dry cloth to clean HP 4062UX/F. 4-46 System Installation...
Page 93: Software Installation Introduction
Following system software installation and customization, information to customize the wafer prober is provided. If your system has the HP Interactive Measurement and Analysis (IMA) software, use this chapter to install your HP IMA software. If you are installing the new software on a hard disk that has been used, Caution Hewlett-Packard recommends that you backup the user's programs and data.
Page 94: Installing The Hp 4062Ux/F System Software
The HP-UX Run-Time Environment, HP BASIC/UX, and HP 4062UX/F system software are required as a minimum environment for the HP 4062UX/F system. If you have any questions about the HP 4062UX/F environment, contact the nearest HP Sales Oce in your area.
Page 95 Figure 5-1. Installation Flowchart for HP 4062UX/F System Software Software Installation 5-3...
Page 96: Installing Hp-Ux And Other Application Software
To install or update HP-UX, refer to the Installing and Updating HP-UX To congure your HP-UX system into a diskless cluster environment and to add a diskless cluster node, use the SAM(1M) command. Note that you must go into single user mode of your HP-UX system to change your kernel to the diskless cluster environment.
Page 97 "TERM value from /e... 1 1 1 1 1 1 1 1 In the default settings, the HP-UX asks you to set the display type when you log in as a root user. To suppress this question, change the parameter in the /.profile...
Page 98: Installing And Customizing Your System
The HP 4062UX/F requires HP BASIC/UX, which must be installed on the HP-UX system before the HP 4062UX/F software can be installed. If the HP 4062UX/F is congured in a diskless cluster, make sure to establish a diskless cluster node (cnode) before installing the HP 4062UX/F system software.
Page 99 This le set is included in HP 4062F software only. DAT stands for digital audio tape. If you install the system software to an HP 4062UX that is congured in a Note diskless cluster, the software must be installed on the root server ( on the diskless cnode).
Page 100 Note environment, the HP-UX update procedure automatically checks to see if the system is clustered. If the update procedure nds the system is on an HP-UX cluster, update creates the necessary Context Dependent Files (CDFs) and directories for all cnodes.
Page 101 HP 4062 control hpib27 s745 0xf0835000 21 1 If your controller is model 745i/747i, internal card is recommended to use for HP 4062UX/F control, and E2071B is recommended to use for prober control. If your controller is model 725, use one E2071B for prober and one E2071B for HP 4062UX/F control.
Page 102 /usr/vue/cong/Xsession /usr/lib/rmb/rmbrc /usr/lib/X11/app-defaults/Rmb For series 300 computers, this command also rebuilds the HP-UX kernel for HP BASIC/UX. 7. If your controller is a series 300 computer, reboot your HP-UX system. If your controller is a series 700 computer, skip this step.
Page 103 1. Modify the /usr/pcs/etc/xinitcolor le according to your graphics and applications. For example, if your HP 4062UX system is furnished with a color display and has the HP IMA/UX software, edit the /usr/pcs/etc/xinitcolor le as follows: ### system. ### For 4062UX on Color display system #/usr/bin/X11/xinitcolormap -c 16 .
Page 104: Computers
You must specify the correct connections between pulse generator (PG) units and HF ports in this le. The default setting in this le assumes that ve HP 8110As (containing two PG units each) are installed in the HP 4062F system, and the PG units are connected to HF...
Page 105 1140 !!HF7 PG41 1150 !!HF8 PG42 1160 !!HF9 PG51 1170 !!HF10 PG52 Software Installation 5-13...
Page 106: Installing And Customizing Hp Ima
Customizing for HP IMA/UX To use the HP IMA/UX system properly, certain system les must be modied. For more information about system les, refer to the HP-UX and HP BASIC/UX manuals. Add the following lines to the conguration le: /usr/lib/rmbrc or $HOME/.rmbrc.
Page 107: Usr/Pcs/Etc/Xinitcolor
The CRT type, which species the CRT resolution of your controller, is dened in the PERCONFIG le. The PERCONFIG le is in the /usr/pcs/etc directory. HP BASIC/UX can use three types of CRTs: 16/19 inch middle-resolution (1024 768), 16/19 inch high-resolution (1280 1024), and VGA (Video Graphics Array).
Page 108: Creating A New User Account
.Xdefaults $ cp /etc/newconfig/rmb/d.Xdefaults ./.Xdefaults $ chmod u+rw .Xdefaults 11. If you use HP IMA/UX with the HP 4062UX/F system, perform the following steps: a. Set the proper fonts for HP BASIC/UX. To do so, edit the $HOME /.Xdefaults by entering: $ vi .Xdefaults...
Page 109 $ cp /usr/pcs/newconfig/d.x11start ./.x11start $ chmod u+rwx .x11start If you use HP 700/X or 700/RX X stations with the HP 4062UX/F system, You must also perform the following customization for each account. For details, see HP 700/X System Administrator's Guide If telnet is used to start the X clients on the X stations: 1.
Page 110 exec >$HOME/.x11startlog 2>$HOME/.x11startlog ### For Color CRT /usr/bin/X11/xinitcolormap -c 16 /etc/newconfig/rmb/xrmbcolormap b. Add the command lines that set the environment variables LANG and KBD LANG if needed. If xdm is used to start the X clients on the X stations: 1.
Page 111: Customizing The Wafer Prober
Customizing the Wafer Prober Use this section to customize the wafer prober. If your HP 4062UX/F system is not used with an automatic or semiautomatic wafer prober, skip this section and go to the next chapter. The HP 4062 supports the following wafer probers:...
Page 113: System VeriCation
System Verification This chapter provides instructions and procedures to verify correct HP 4062UX/F operation. System verication should be performed immediately after system installation. System Verification 6-1...
Page 114: Verifying The System Con Guration With Start Program
System Configuration Verification for HP 4062UX The rst step in verifying correct system operation is to check the conguration of the HP 4062UX system instruments. To do so, perform the START program included in the system software. Use the following procedures to run the START program.
Page 115 Figure 6-1. Example of Configuration Page (HP 4062UX) If your SWM has a port expander (Option 340), the following description, for Note example, is displayed in the START conguration display page: *************** SYSTEM CONFIGURATION ******************|**** AVAILABLE PINS ***** 4084B/4089B SWITCHING MATRIX (Opt. 340):...
Page 116: Verifying The System Con Guration With Start.f Program
System Configuration Verification for HP 4062F The rst step in verifying correct system operation is to check the conguration of the HP 4062F system instruments. To do so, perform the START.F program included in the system software. Use the following procedures to run the START.F program.
Page 117: System Performance Veri Cation For Hp 4062Ux
HP 16346B/C HP 16366A/B If the HP 4062UX is equipped with an HP 4284A 20 Hz { 1 MHz Precision LCR Meter, both the HP 16346B and the HP 16346C are required. Otherwise, only the HP 16346B is required. If the HP 4062UX is equipped with an HP 4284A 20 Hz { 1 MHz Precision LCR Meter, only the HP 16366B is required.
Page 118 If your SWM has a port expander and if unsupported instruments are Note connected to the AUX ports on the port expander box, remove the connectors from the AUX ports that are connected to unsupported instruments. In place of the unsupported instruments, attach BNC shorting caps to the AUX ports. Note that the AUX33 and AUX43 ports, which are triaxial connectors, can be connected to SMUs.
Page 119: Running The Pv4062
Running the PV4062 To start PV4062, perform the following procedure: 1. Turn the system controller on and boot the HP-UX system. 2. Log in as a superuser. 3. Change the current directory to the /usr/pcs/diag directory as follows: $ cd /usr/pcs/diag 4.
Page 120: The 4062Ux W/O Dvm
If the HP 4280A CMU is present in your system and is connected to the SWM properly, this test is performed. If the HP 4284A CMU84 is present in your system and is connected to the SWM properly, this test is performed.
Page 121: Procedure
When START nishes, a conguration page of START similar to that shown in Figure 6-1 is displayed for less than a second, and the start-up menu page as shown in Figure 6-5 appears on the screen. If your HP 4062UX system is equipped with a CMU84, the softkey is NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN HP4284A Corr.
Page 122: Calibration Module Menu Page For 48-Pin Swm System
HP 16346B for performance verication of the HP 4085B SWM. Select the desired softkey of the product number according to your system instrument. For example, if your system is equipped with an HP 4284A CMU84 and a 48-pin SWM, select the softkeys and modify both calibration module data.
Page 123: Test Lead Connections For Open Correction
Start-up Menu calibration module menu page to return to the startup page. 6. If your HP 4062UX system is equipped with a CMU84, perform the OPEN and SHORT corrections of the CMU84. To do so, select the softkey and follow the NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN HP4284A Corr.
Page 124: Test Lead Connections For Short Correction
Figure 6-9. Test Lead Connections for SHORT Correction After the OPEN and SHORT corrections, connect the test leads to the SWM using the BNC-BNC cables and the BNC f-to-f adapters. 7. Select the softkey. The 4062UX W/O DVM test menu page similar to Figure 6-10 NNNNNNNNNNNNNNNNN Start is displayed.
Page 125: Pv Test Results Data Entry Page
To view the le catalog, enter 4 Return 5 To keep the test results, select the softkey. NNNNNNNNNNN 10. The following message is displayed: Type filename. Press RETURN to cancel. Enter the lename for the PV test results. Do not specify a le name on the current directory or on the current exible disk.
Page 126 Test nishes without errors, the test results are displayed as shown in Figure 6-13. When testing the HP 4089B 96-pin SWM, the Relay Test performs a Pin Board Test and an Input Relay Test, which checks all input relays on the port boards on/o (make/break) operation.
Page 127: Relay Test Results Page For 48-Pin Swm
Figure 6-13. Relay Test Results Page for 48-pin SWM Figure 6-14. Relay Test Results Page for 96-pin SWM 13. Install the system calibration module on the SWM and select the softkey to start NNNNNNNNNNNNNN NEXT the SMU Test. When the test nishes, test results are displayed as shown in Figure 6-15. System Verification 6-15...
Page 128: Smu Test Results Page
Figure 6-15. SMU Test Results Page 14. Select the softkey to start the VS Test. Follow the VS to AUX port connection NNNNNNNNNNNNNN NEXT instructions on the display. When the VS Test nishes, test results are displayed as shown in Figure 6-16. Figure 6-16.
Page 129: Vm Test Results Page
Figure 6-18. Figure 6-18. AFU Test Results Page 17. If the system is equipped with an HP 4280A CMU, it proceeds to the CMS C-G Test when you select the softkey. Go to next step.
Page 130: Cms C-G Test Results Page For 48-Pin Swm
18. The CMS C-G Test is performed. When the test nishes, test results are displayed as shown in Figure 6-19 for 48-pin SWM, and as shown in Figure 6-20 for 96-pin SWM. Figure 6-19. CMS C-G Test Results Page for 48-pin SWM Figure 6-20.
Page 131: Cms Bias Test Results Page For Hp 4280A
Figure 6-21. CMS Bias Test Results Page for HP 4280A 20. The CMU84 C-G Test is performed. For the 48-pin SWM, make sure that the HP 16346C Calibration Module is installed on the SWM. For the 96-pin SWM, make sure that the HP 16366B Calibration Module is installed on the SWM.
Page 132: Cmu84 Bias Test Results Page For Hp 4284A
Figure 6-23. CMU84 Bias Test Results Page for HP 4284A 22. For the DC Leakage Test, make sure only the test xture adapter is installed on the SWM. Select the softkey to start the DC Leakage Test. NNNNNNNNNNNNNN NEXT When the DC Leakage Test nishes, test results are displayed as shown in Figure 6-24.
Page 133: Displaying And Printing Test Results
Test Facility: Hewlett-Packard Report No.______________________ _________________________________ Date _________________30 May 1991 _________________________________ Customer ________________________ _________________________________ Tested by _________Cheryl Jenkins HP 4062UX: Serial Number ____________2830J00165 Temperature ___23 degrees Celsius Firmware Revision _______________ Humidity ____________________47 % Line Frequency _______Hz(nominal) User 1 Caps Running...
Page 134 4. Select the softkey. The printer conguration page is displayed as shown in NNNNNNNNNNNNNNNNNNNNNNN PRINTER Figure 6-26. Figure 6-26. An Example of Printer Configuration Page 5. To change the printer conguration, select the softkey. Refer to Appendix B for NNNNNNNNNNNNNNNNNNNNNNNNNN RECONFIG information to congure the system printer.
Page 135: An Example Page Of View Result (Printer)
Figure 6-27. An Example Page of View Result (Printer) System Verification 6-23...
Page 136: System Performance Veri Cation For Hp 4062F
For failures, refer to manual of the instrument that failed for instructions on handling self-test failures. The HP 4062F needs at least 40 minutes to warm up. If you don't allow the Note HP 4062F enough time to warm up, Hewlett-Packard does not guarantee any performance verication data.
Page 137 1250-1200 SMA(m)-to-BNC(f) Adapter Furnished with the HP 4062F system. If HP 41420A 200 V/1 A SMU is installed in the HP 4142B, the HP 16346B must be used for the W/O DVM tests. If the HP 4062F is equipped with an HP 4284A Precision LCR Meter, both the HP 16346B and the HP 16346C are required for the 4062F DC W/O DVM tests.
Page 138: Running Pv4062.F
Running PV4062.F To start PV4062.F, perform the following procedure: 1. Turn the system controller on and boot the HP-UX system. 2. Log in as a superuser. 3. Change the current directory to the /usr/pcs/diag directory as follows: # cd /usr/pcs/diag 4.
Page 139: 4062F Dc W/O Dvm" Test
For both test modes, the program displays a running record of test results. To verify HP 4062F after installation, you must execute these subtests sequentially, and save the test results in a le for future reference.
Page 140: Test Procedure
HP4284A Corr. softkey is also displayed. If you select this softkey, the CMU84 performs the OPEN and SHORT correction. However, you do not need to execute this correction to verify HP 4062F system installation. Refer to the HP 4284A for details.
Page 141: Calibration Module Menu Page
HP 16346B for performance verication of the HP 4085F SWM. If your system is equipped with an HP 4284A CMU84, an HP 16346C is also required. Select the desired softkey of the product number according to your system instrument.
Page 142 Figure 6-7 shows an example of an HP 16346C calibration data entry page. You can move the eld pointer by using the arrow keys or the key. The data at the eld 4 Tab 5 pointer is displayed in the display area. If you want to change the displayed data, type in new data, then press .
Page 143 3. Select the softkey. The 4062F DC W/O DVM test menu page similar to NNNNNNNNNNNNNNNNN Start Figure 6-32 is displayed. M E N U * * * * * * * * * * * * * * * * * * * * * * * * Relay Test SMU Test Tests can be executed individually by...
Page 144: Pv Test Results Data Entry Page
If you entered an existing le name, go to step 6. If you entered a new le name, a page is displayed (similar to that shown in Figure 6-33) for entering test information. Follow displayed instructions. HP 4062F Semiconductor Parametric Test System Tested by...
Page 145: Relay Test Results Page
Normally open contacts of a SENSE TRANSFER relay not functioning properly. While testing the HP 4085F SWM, the Relay Test performs a Pin Board Test, which checks on/o (make/break) operation of all relays on the pin boards. If the Relay Test nishes without errors, the test results are displayed as shown in Figure 6-13.
Page 146: Smu Test Results Page
SMU Test Remove the relay test adapter from the SWM, install the HP 16346A/B System Calibration Module, then select the softkey to start the SMU Test. When the test NNNNNNNNNNNNNN NEXT nishes, test results are displayed as shown in Figure 6-15.
Page 147: Vs Test Results Page
VS Test Select softkey to start VS Test. Follow VS to AUX port connection instructions. NNNNNNNNNNNNNN NEXT ++++++++++ VS TEST +++++++++++ |---TEST RESULTS--| | VS | RELAY | SMU | VS | VM | AFU | CMS C-G | | CMS BIAS | | DC LEAK | VS TEST FINISHED VM Test is next.
Page 148: Afu Test Results Page
SKIP EXIT Figure 6-38. AFU Test Results Page If the system is equipped with an HP 4280A CMU, the CMS C-G Test is Note next. Go to next step. If the system is equipped with an HP 4284A CMU84, the CMU84 C-G Test is next.
Page 149: Cms C-G Test Results Page For Hp 4280A
NEXT SKIP EXIT Figure 6-39. CMS C-G Test Results Page for HP 4280A CMS Bias Test Select softkey to start CMS Bias Test. When test nishes, results are displayed as NNNNNNNNNNNNNN NEXT shown in Figure 6-21. Go to step 16.
Page 150: Cmu84 C-G Test Results Page For Hp 4284A
CMU84 C-G Test Select softkey to start CMU84 C-G Test. Make sure that HP 16346C calibration NNNNNNNNNNNNNN NEXT module is installed on SWM. When test nishes, results are displayed: ++++++++ CMU84 TEST ++++++++++++++++++++ |----TEST RESULTS---| | CMU84 C-G | | RELAY | STRAY CAP.
Page 151: Dc Leak Test Results Page
Relay Test ........16075F, 04085-60006 SMU, VS, VM, AFU, CMU C-G, CMU BIAS Tests ... 16346A/B CMU84 C-G, CMU84 BIAS Tests ....16346C DC LEAK Test ........ 16066A HP 4062F PERFORMANCE VERIFICATION FINISHED. Select the desired softkey. User 1 Caps Running...
Page 152: 4062F Ac" Test
HP 4085F SWM. Then mount the HP 16354F on the SWM according to messages displayed by the system software. If you mount the HP 16354F on the SWM when a voltage or current source is forcing voltage or current, dangerous voltages may be present on the connectors of HP 16354F, and may shock you.
Page 153: Preparation
HP 54121T. 1. Connect an HP-IB cable to the HP-IB connector on the rear panel of the oscilloscope. 2. Connect the other end of the HP-IB cable to the built-in HP-IB connector or the HP-IB card of the system controller.
Page 154: Test Procedure
3. Remove 50 Ohm terminator from PG1 TRIG OUT cable, then connect the cable to HP 54121A TRIG terminal. 4. Set the HP-IB address of HP 54120B to 2707 (To change address, select "HP-IB ADDRESS" softkey. 5. Mount the HP 16354F atop the SWM.
Page 155 - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - - HP 4062F Performance Verification Program for AC function...
Page 156 NEXT SKIP EXIT You can select a softkey to execute calibration for each HP 8110A individually or for all HP 8110As. b. Select the softkey. The calibration is executed for all the pulse generator units of NNNNNNNNNNN the HP 8110A.
Page 157: Displaying And Printing Test Results
Test Facility: Hewlett-Packard Report No. ______________________ _________________________________ Date _________________10 Feb 1994 _________________________________ Customer ________________________ _________________________________ Tested by _________Cheryl Jenkins HP 4062F: Serial No. ____________JP10B00101 Temperature _______________23.4 C Firmware Revision _______________ Humidity ____________________53 % User 1 Running aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa aaaaaaaaaaaaaaa...
Page 158: Printing Pv Test Results
5. Enter report number that you want to appear on the printout. For example, type: 4 Return 5 The printer conguration page is displayed as shown in Figure 6-26. ********** CONFIGURATION ********** PRINTER TYPE = HP-UX SPOOL PRINTER ADDR = | lp PAGE LENGTH = 66 MARGIN...
Page 159: An Example Page Of View Result (Printer)
Figure 6-49. An Example Page of View Result (Printer) System Verification 6-47...
Page 161: Updating The System Software
Updating the System Software Introduction The HP 4062UX/F system software will occasionally be revised. When the HP 4062UX/F system software is updated, new software and documentation are delivered to customers who have an HP Software Support Product. If manuals are revised with the system software, a new set of manuals is also delivered.
Page 163: ConGuring The System Printer For Pv4062/Pv4062.F
The HP 4062UX/F environment allows three types of printers: local by HP BASIC/UX (series 300 only), spooled by HP-UX , and remote by SRM (series 300 only). Before using your desired printer, you must set the proper conguration information as described in this appendix.
Page 164 NNNNNNNNNNNNNNNNNNNNNNNNNN RECONFIG Figure B-1. Table B-1. Default Printer Configuration Settings Item Default PRINTER TYPE HP-UX SPOOL PRINTER ADDRESS PRINTER I/F HP-IB SPOOL DIRECTORY /spool:REMOTE SPOOL COMMAND BAUD RATE (RS-232C) 9600 baud PAGE LENGTH...
Page 165 Figure B-2. Printer Configuration Softkey Map The following describes each softkey: Displays the , and softkeys for selecting NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN NNNNNNNNNNNNNNNNN NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN NNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNNN PRINTER TYPE LOCAL FILE SPOOL HP-UX SPOOL or changing the presently set printer. Configuring the System Printer for PV4062/PV4062.F B-3...
Page 166 4 Return 5 If you press only, the present address of the printer is retained. 4 Return 5 If you enter a new select code and HP-IB address, the message \Select printer I/F" is displayed and two softkeys| |appear. NNNNNNNNNNNNNNNNN...
Page 167 For changing the top, bottom, and left margins. NNNNNNNNNNNNNNNNNNNN MARGIN After selecting this softkey, the message \Type new margin (top,bottom,left)" is displayed. Enter three values separated by commas. For example, enter: 4, 4, 2. The top margin, bottom margin, and page length settings must satisfy the following conditions: top margin bottom margin...
Page 169: Installation Problems You May Encounter
The codeword is incorrect in the Check the contents of the CODEWORD le. If it CODEWORD le. is incorrect, call the nearest HP Sales Oce. The CODEWORD le does not exist. Check that the CODEWORD le is located in correct directory (/usr/pcs/etc).
Page 170: Start Error 300 : Pcs Session Id Not De Ned
START ERROR 330 : Device file /dev/pcs/hpib not found. Possible Cause Solution The select code of HP-IB interface card is Check the select code setting of additional HP-IB incorrect. interface card. When you are using a diskless cluster Check the contents of /usr/pcs/etc/SYSCONFIG system and the computer for a diskless le.
Page 171: Start Error 450 : Fatal Error In Pcsstart Command
START ERROR 450 : Fatal error in pcsstart command. The following error message is displayed: Location = Obtain_session_key_file() Function = create() xxxx Parameter = /usr/pcs/session/pcs_ Permission denied Possible Cause Solution The owner, group, or permission of Its owner and group are \root". The permission of /usr/pcs/bin/pcsstart is incorrect.
Page 172: System Con Guration Error
The HP-IB cables are not connected Shut down the computer system, then turn the properly. system o. Conrm the HP-IB cable connections. Errors during the PV4062/PV4062.F Program Error occurs while Test Infomation of File is being Stored As described in Chapter 6, you specify a le name in which you want to save the PV results.
Page 173 Error when reading from or writing to a le. Installation Problems You May Encounter C-5...

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